Magnetic targets represent the most difficult challenge for utilization in the sputtering industry. High permeability materials create an inconsistent, non-linear environment for magnetic fields, severely decreasing utilization. For example, permalloy targets produce typically pinched grooves, causing a premature burn-through on the target. Under these conditions, sputtering characteristics change dramatically over the life of the target. Our patented designs (U.S. Patent #5,415,754) for magnetic targets avoid this pinching problem and provide uniform sputtering conditions throughout the target life. Sierra typically achieves between 15-20% for the same permalloy targets while our competitors typically achieve 4%-5% usage for the same materials.
|Target Material||Target Thickness (in)||% Utilization
Sierra Design Other Design
Typical results using Sierra’s design for magnetic materials (U.S. Patent #5,415,754) show a two- to four-fold increase in target utilization.