Sierra Applied Sciences

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Sierra Applied Sciences

LEADING THE
THIN-FILM INDUSTRY

RECTANGULAR CATHODES

With target widths of 2″ to 11″ and lengths up to 140″, you can get Sierra’s rectangular cathodes in virtually any size you’re likely to need. As with our round cathodes, you can choose from several different mounting styles and add the process gas manifold.

Target Utilization
Target utilization and life are two important factors in choosing a magnetron cathode. The table below shows typical target erosion results for many of our cathode designs. We base our measurements on “useable” target utilization and on standard “burn-through” target utilization. However, the best way to verify the utilization of a target is to look at the used targets.

Target Size% Used **
A / B
KWHRVolume UsedGroove Depth
2 x 38 x 1/4
3.5 x 30 x 3/8
5 x 12 x 1/2
5 x 12 x 5/8
5 x 36 x 1/2
6 x 12 x 5/8
6 x 46 x 5/8
8 x 36 x 7/8
28 / 33
40 / 43
38 / 42
33 / 39
37 / 40
41 / 48
40 / 47
44 / 50
181
395
371
409
975
793
2170
3361
 5.1 in3
15.7 in3
12.0 in3
15.0 in3
36.0 in3
23.0 in3
69.0 in3
111.0 in3
0.183
0.250
0.450
0.525
0.461
0.575
0.583
0.763

Results are for aluminum targets, most eroded at 3 mTorr Argon at 9KW.

**We use two methods to calculate target utilization: Method A: % weight lost. Method B: % weight lost * target thickness / groove depth. Method A is useful for processes that use targets without backing plates, while method B is used when a backing plate is present, allowing erosion through the full target thickness.